Copper Interconnects, New Contact Metallurgies/structures, and ...

Author: G. S. Mathad
Publisher: None

ABOUT BOOK

... intensive and area intensive diode structures . The diodes were 460μm × 246μm in size , with SALICIDE block . The reason for blocking silicide formed on the diode was to ensure that the leakage current was caused by the p - n junction ...

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